Journal
MECHANICAL SCIENCES
Volume 2, Issue 1, Pages 129-137Publisher
COPERNICUS GESELLSCHAFT MBH
DOI: 10.5194/ms-2-129-2011
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Funding
- NSF [STTR 0637850, 0900368, 0437214]
- NSF I/UCRC Ceramic and Composite Materials Center
- Pennsylvania State University Materials Research Institute Nanofabrication Network
- National Science Foundation, National Nanotechnology Infrastructure Network [0335765]
- Cornell University
- National Institute of Biomedical Imaging And Bioengineering [R21EB006488]
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The fabrication of compliant mechanisms on the mesoscale requires collaboration of mechanical engineering design, with materials science and engineering fabrication approaches. In this paper, a review of current fabrication approaches to produce mesoscale devices is given, highlighting the benefits and limitations of each technique. Additionally, a hierarchy is provided, eliminating fabrication techniques that do not completely satisfy the mechanical design requirements of the compliant mechanisms. Furthermore, the lost mold-rapid infiltration forming process (LM-RIF) is described, and compared to existing fabrication approaches. Finally, prototype mesoscale compliant mechanisms are fabricated, demonstrating the versatility of the LM-RIF process to produce both metal and ceramic devices, as well as ability of a fabrication process to work in collaboration with mechanical design.
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