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Femtosecond-Laser Direct Writing of Metallic Micro/Nanostructures: From Fabrication Strategies to Future Applications

Journal

SMALL METHODS
Volume 2, Issue 7, Pages -

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/smtd.201700413

Keywords

femtosecond-laser direct writing; metallic microstructures; nanofabrication; photochemistry; photoreduction

Funding

  1. National Key Research and Development Program of China
  2. National Natural Science Foundation of China (NSFC) [2017YFB1104300, 61522503, 61775078, 61590930, 61435005]

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The past decade has seen growing research interest in developing novel fabrication methodologies for metallic micro/nanostructures toward the rational design and integration of 0D to 3D metallic configurations. Among the various fabrication techniques, femtosecond-laser direct writing has emerged as a prominent approach to reach this goal and greatly facilitates the development of metallic micro/nanostructure-enabled applications. Here, a series of femtosecond-laser-mediated fabrication strategies, including the two-photon reduction of metal ions, template-assisted metal coating and metal filling, photodynamic assembly of metal nanoparticles, and selective nanoparticle sintering, are summarized. Additionally, abundant applications in microelectronics, metamaterials, near-field optics, microfluidics, micromechanics, and microsensors are introduced in detail. Current challenges and future perspectives in this field are also discussed.

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