Journal
NANO CONVERGENCE
Volume 5, Issue -, Pages -Publisher
SPRINGER
DOI: 10.1186/s40580-018-0158-x
Keywords
Transition metal dichalcogenides (TMDs); 2D materials; Growth mechanisms; Chemical vapor deposition; Morphology
Funding
- Innovation and Technology Commission [ITC-CNERC14SC01]
- Research Grant Council of Hong Kong SAR [16204815]
- NSFC-RGC Joint Research Scheme [N_HKUST607/17]
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Two-dimensional (2D) transition metal dichalcogenides (TMDs) have stimulated the modern technology due to their unique and tunable electronic, optical, and chemical properties. Therefore, it is very important to study the control parameters for material preparation to achieve high quality thin films for modern electronics, as the performance of TMDs-based device largely depends on their layer number, grain size, orientation, and morphology. Among the synthesis methods, chemical vapor deposition (CVD) is an excellent technique, vastly used to grow controlled layer of 2D materials in recent years. In this review, we discuss the different growth routes and mechanisms to synthesize high quality large size TMDs using CVD method. We highlight the recent advances in the controlled growth of mono- and few-layer TMDs materials by varying different growth parameters. Finally, different strategies to control the grain size, boundaries, orientation, morphology and their application for various field of are also thoroughly discussed.
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