Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 27, Issue 5, Pages 2612-2622Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMECH.2021.3112267
Keywords
Acoustic transducers; Duffing oscillator; electrostatic actuators; equivalent-circuit model; microactuators
Categories
Funding
- Fraunhofer-Zukunftsstiftung
- State of Brandenburg
- European Union [80256335]
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This article introduces a circuit model that captures the full nonlinear behavior of an asymmetric electrostatic transducer, showing good simulation performance for MEMS loudspeakers or microphones. The fitted parameters of the model agree well with experimental data, and additional complex behaviors can be introduced if needed.
This article presents a circuit model that is able to capture the full nonlinear behavior of an asymmetric electrostatic transducer whose dynamics are governed by a single degree of freedom. Effects such as stress-stiffening and pull-in are accounted for. The simulation of a displacement-dependent capacitor and a nonlinear spring is accomplished with arbitrary behavioral sources, which are a standard component of circuit simulators. As an application example, the parameters of the model were fitted to emulate the behavior of an electrostatic MEMS loudspeaker whose finite-element (FEM) simulations and acoustic characterisation where already reported in the literature. The obtained waveforms show good agreement with the amplitude and distortion that was reported both in the transient FEM simulations and in the experimental measurements. This model is also used to predict the performance of this device as a microphone, coupling it to a two-stage charge amplifier. Additional complex behaviors can be introduced to this network model if it is required.
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