Journal
BIOMICROFLUIDICS
Volume 3, Issue 3, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3230500
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- King Abdullah University of Science and Technology (KAUST) [SA-C0040/U.K.-C0016]
- Hong Kong RGC [HKUST 621006]
- Nanoscience and Nanotechnology Program
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A novel microfluidic pressure sensor which can be fully integrated into polydimethylsiloxane (PDMS) is reported. The sensor produces electrical signals directly. We integrated PDMS-based conductive composites into a 30 mu m thick membrane and bonded it to the microchannel side wall. The response time of the sensor is approximately 100 ms and can work within a pressure range as wide as 0-100 kPa. The resolution of this micropressure sensor is generally 0.1 kPa but can be increased to 0.01 kPa at high pressures as a result of the quadratic relationship between resistance and pressure. The PDMS-based nature of the sensor ensures its perfect bonding with PDMS chips, and the standard photolithographic process of the sensor allows one-time fabrication of three dimensional structures or even microsensor arrays. The theoretical calculations are in good agreement with experimental observations. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3230500]
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