Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 79, Issue 2, Pages 115-121Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0924-4247(99)00279-4
Keywords
microfluidic system; thermal flow sensor; micro pump; acoustic streaming
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This paper presents the design, fabrication, and characterization of a micromachined flow sensor, which is integrated onto the flexural plate wave (FPW) micropump. The flow sensor and the FPW micropump represent a complex microfluidic system that is able to control the fluid flow in the device. The system was designed using a commercial software package. The microfluidic system of a size of 10 x 10 mm was fabricated using common fabrication techniques. The micropump is made of an aluminum, piezoelectric zinc oxide, polysilicon. and low-stress silicon nitride membrane with a typical thickness of 1-3 mu m, The thermal flow sensor consists of a polysilicon heater and polysilicon-aluminum thermopiles as temperature sensors. The cold junctions of the thermopiles are located in a new design that will avoid the drift effect of the flow sensor, The results show expected flow velocity-drive voltage characteristics. (C) 2000 Elsevier Science S.A. All rights reserved.
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