Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
Volume 39, Issue 2A, Pages L79-L81Publisher
JAPAN J APPLIED PHYSICS
DOI: 10.1143/JJAP.39.L79
Keywords
quantum dots; self-organization; droplet epitaxy; MBE; GaAs; AlGaAs
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We propose a modified droplet epitaxy method for fabricating self-organized GaAS/AlGaAs quantum dots (QDs) with a high As flux irradiation and a low substrate temperature. By our novel method, GaAs QDs were successfully formed, retaining their pyramidal shape; original base size and density of droplets, and preventing layer-by-layer growth. Quantum size effects of the QDs were distinctly observed by photoluminescence measurements. It was confirmed that this new modified droplet epitaxy method is promising for fabricating a high-quality GaAs/AlGaAs QD system.
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