Laser produced Ag ions for direct implantation

The amount and properties of ions produced by laser ablation of Ag targets have been analyzed. The maximum ion current density j(max)=21.0 mA and maximum charge state Ar37+ of the ions produced by a laser power density of about 1x10(14) W cm(-2) at 1.315 and 0.657 mu m on an Ag target have been determined. Direct implantation of the Ag ions from the laser-produced plasma has also been studied. An implanted ion density of 3.5x10(16) cm(-2) at a depth of 500 nm in Al samples was determined by RBS. (C) 2000 American Institute of Physics. [S0034-6748(00)63302-6].