Journal
APPLIED PHYSICS LETTERS
Volume 76, Issue 7, Pages 843-845Publisher
AMER INST PHYSICS
DOI: 10.1063/1.125603
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The early failure issue in electromigration (EM) has been an unresolved subject of study over the last several decades. A satisfying experimental approach for the detection and analysis of early failures has not been established yet. In this study, a technique utilizing large interconnect arrays in conjunction with the well-known Wheatstone Bridge is presented. A total of more than 20 000 interconnects were tested. The results indicate that the EM failure mechanism studied here follows lognormal behavior down to the four sigma level. (C) 2000 American Institute of Physics. [S0003-6951(00)03007-2].
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