Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
Volume 39, Issue 2B, Pages L169-L171Publisher
JAPAN J APPLIED PHYSICS
DOI: 10.1143/JJAP.39.L169
Keywords
epitaxy; CVD; anatase; film; orientation; sapphire; MgO; SrTiO3; SEM; XRD
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Crystalline orientation often provides particularly the anisotropy of chemical and physical properties. Since the epitaxial films are composed of highly oriented crystals, it is expected that chemical and physical advantages are predominantly in one specific direction. In this study, high-rate epitaxy of anatase films was attempted using a chemical-vapor-deposition technique. Four types of epitaxial anatase films were obtained, i.e., (112), (110), (100) and (001) oriented normal to the substrate surface. These films reduced methylene blue under ultraviolet irradiation. The reduction rate of methylene blue was largely affected in the direction of crystalline orientation.
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