Journal
APPLIED PHYSICS LETTERS
Volume 76, Issue 9, Pages 1128-1130Publisher
AMER INST PHYSICS
DOI: 10.1063/1.125959
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We have templated Cu(100) surfaces with self-assembled arrays of atomic nitrogen islands and then used these islands as masks for Co growth. This method of nanolithography enables the creation of Co dot arrays with dot densities 4 x 10(12) cm(-2) (27 teradots/in.(2)). Adjusting the nitrogen coverage also enabled the creation of arrays of Co lines spaced 10 nm (0.01 mu m) apart. (C) 2000 American Institute of Physics. [S0003-6951(00)04309-6].
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