An integrated MEMS three-dimensional tactile sensor with large force range

An integrated three-dimensional tactile sensor with robust MEMS structure and soft contact surface suitable for robotic applications was developed. The sensor has a maximum force range of 50 N in the vertical direction and +/-10 N in the x and y horizontal directions. The tactile sensor includes 4 X 8 sensing cells each exhibiting an independent, linear response to the three components of forces applied on the cells. By finite element analysis, optimal cell structures and piezoresistor positions were determined. Post bulk-micromachining was performed on foundry-fabricated CMOS chips to produce the sensor cells. With neural network training, the tactile sensor produced reliable three-dimensional force measurements and repeatable response on tactile images. Design analysis, fabrication procedures, and experimental results are presented in this paper. (C) 2000 Published by Elsevier Science S.A. All rights reserved.