☆ 4.7 Article

Thickness dependence of elastic modulus and hardness of on-wafer low-k ultrathin polytetrafluoroethylene films

SCRIPTA MATERIALIA (2000)

Journal

SCRIPTA MATERIALIA

Volume 42, Issue 7, Pages 687-694

Publisher

PERGAMON-ELSEVIER SCIENCE LTD

DOI: 10.1016/S1359-6462(99)00421-2

Keywords

thin films; nanoindentation; polytetrafluoroethylene; dielectric materials; Young's modulus; hardness

Categories

Nanoscience & Nanotechnology Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering

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