Journal
APPLIED SURFACE SCIENCE
Volume 157, Issue 4, Pages 337-342Publisher
ELSEVIER
DOI: 10.1016/S0169-4332(99)00548-6
Keywords
flexural modes; non-contact force microscopy; oscillation
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The oscillation characteristics of higher flexural modes of a rectangular microfabricated silicon cantilever have been studied in ultra-high vacuum (UHV) for a free cantilever and for a typical situation in non-contact force microscopy. The results are discussed with respect to the use of such modes in dynamic force microscopy (DFM) and local dissipation measurements. (C) 2000 Elsevier Science B.V. All rights reserved.
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