Journal
APPLIED PHYSICS LETTERS
Volume 76, Issue 15, Pages 2068-2070Publisher
AMER INST PHYSICS
DOI: 10.1063/1.126257
Keywords
-
Categories
Ask authors/readers for more resources
Transport measurements were carried out on 15-35 nm diameter silicon nanowires grown using SiH4 chemical vapor deposition via Au or Zn particle-nucleated vapor-liquid-solid growth at 440 degrees C. Both Al and Ti/Au contacts to the wires were investigated. The wires, as produced, were essentially intrinsic, although Au nucleated wires exhibited a slightly higher conductance. Thermal treatment of the fabricated devices resulted in better electrical contacts, as well as diffusion of dopant atoms into the nanowires, and increased the nanowire conductance by as much as 10(4). Three terminal devices indicate that the doping of the wires is p type. (C) 2000 American Institute of Physics. [S0003-6951(00)00715-4].
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available