Journal
SOLID STATE TECHNOLOGY
Volume 43, Issue 5, Pages 151-+Publisher
PENNWELL PUBL CO SOLID STATE TECHNOLOGY OFFICE
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The wafer-level fabrication of liquid crystal on silicon microdisplays is attractive because it leverages existing equipment and processes created for the semiconductor and flat panel display industries. A ferroelectric liquid crystal technology enables microdisplays to be constructed directly on advanced low-voltage CMOS ICs, and this process flow is described in detail.
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