Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 82, Issue 1-3, Pages 191-197Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0924-4247(99)00369-6
Keywords
on-chip optical microspectrometer; microinterferometer; Fabry-Perot etalon; light-to-frequency converter; internal/external bus interface
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Numerous applications, e.g., systems for chemical analysis by optical absorption and emission line characterization, will benefit from the availability of low-cost single-chip spectrometers. A single-chip CMOS optical microspectrometer containing an array of 16 addressable Fabry-Perot etalons (each one with different resonance cavity length), photodetectors and circuits for read-out, multiplexing and driving a serial bus interface has been fabricated. The result is a chip that can operate using only four external connections (including V-dd and V-ss) covering the visible spectral range of the spectrum with FWHM = 18 nm. Frequency output and serial bus interface allow easy multi-sensor, multi-chip interfacing using a microcontroller or a personal computer. Power consumption is 1250 mu W for a clock frequency of I MHz. (C) 2000 Elsevier Science S.A. All rights reserved.
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