Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 83, Issue 1-3, Pages 130-135Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0924-4247(00)00296-X
Keywords
polymer microfabrication; hot embossing; microfluidics; mu-TAS
Ask authors/readers for more resources
Polymer microfabrication methods are becoming increasingly important as low-cost alternatives to the silicon or glass-based MEMS technologies. We present in this paper the technology of hot embossing as a flexible, low-cost microfabrication method for polymer microstructures, which uses the replication of a micromachined embossing master to generate microstructures on a polymer substrate. With this fabrication technology high aspect ratio structures can be fabricated over large surface areas, which allows a commercially successful manufacturing of polymer microcomponents. (C) 2000 Elsevier Science S.A. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available