Dielectric constant measurement of thin films by differential time-domain spectroscopy

We present a theoretical model and preliminary experimental results on the dielectric constant measurement of thin films by using differential time-domain spectroscopy. This technique greatly reduces the minimum measurable thickness, and it promises the dielectric constant measurement of mu m-thick thin films with the frequency range from GHz to THz. (C) 2000 American Institute of Physics. [S0003-6951(00)03922-X].