Journal
APPLIED PHYSICS LETTERS
Volume 76, Issue 22, Pages 3215-3217Publisher
AMER INST PHYSICS
DOI: 10.1063/1.126633
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Atomic force microscopy is used to characterize the evolution of film morphology produced by heavy-ion bombardment. Pt films, 3 and 5 nm thick, are deposited on SiO2 substrates and subsequently bombarded by 800 keV Kr+. Ion doses of > 2x10(14) initiate pattern formation and the dewetting of Pt films from the substrate. The film morphology becomes increasingly disconnected with increasing dose; at the highest doses, (similar to 2x10(16) cm(-2)), isolated nanoparticles are formed with a uniform spacing. The results are explained by the nucleation of bare substrate patches and subsequent coarsening of the morphology by the molten zones created by individual Kr+ impacts. (C) 2000 American Institute of Physics. [S0003-6951(00)02422-0].
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