Journal
APPLIED SURFACE SCIENCE
Volume 159, Issue -, Pages 8-13Publisher
ELSEVIER
DOI: 10.1016/S0169-4332(00)00126-4
Keywords
optical interconnection; interfacial roughness; Si, SiO2
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Silicon microphotonics is the optical equivalent of microelectronics for integrated circuits. Photonics enables interconnection bandwidth that is not limited by the resistance, capacitance and reliability constraints of metal lines. The key issue is the integration of photonic components with integrated circuit electronics. (C) 2000 Elsevier Science B.V. All rights reserved.
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