Fabrication techniques and materials commonly used for the production of microreactors and micro total analytical systems

Over the last decade, microfabrication techniques have been reported for the production of devices in which fluidic manipulation and component separations of chemical and biological materials can be carried out. The term micro total analytical system (mu TAS) is an accepted concept. However, it is perhaps the potential application of microfabricated devices in the wider context that has given added momentum to their development. In this review, the focus will be on the materials and fabrication methods frequently encountered for the production of such devices. Fluidic manipulation is achieved with either hydrostatic displacement pumps such as the syringe pump or electro-osmotic flow, which brings the added advantage of electrophoretic separations. (C)2000 Elsevier Science B.V. All rights reserved.