Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 10, Issue 2, Pages 136-146Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/10/2/307
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This paper reviews deposition, integration. and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems. As examples, a piezoelectric ultrasonic micromotor and pyroelectric infrared detector array are presented. A summary of the published data on the piezoelectric properties of PZT thin films is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented.
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