Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 10, Issue 2, Pages 124-129Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/10/2/305
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A microsystem for wireless long-term measurement of the intraocular pressure is presented. The sensing element is a novel distributed parallel-resonant inductive-capacative circuit. with a pressure-dependent resonance frequency. This circuit is bared upon a twofold on-chip deposited inductor. The high Q inductor is deposited by electrodeposition of copper on a micromachined chip incorporating a pressure-sensitive diaphragm. Test structures were fabricated and characterized. Q factors of 30 at 45 MHz and inductance values of 0.4 mu H are obtained for 3 x 3 mm(2) structures.
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