Journal
SOLID STATE IONICS
Volume 131, Issue 1-2, Pages 79-96Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0167-2738(00)00624-X
Keywords
SOFC; thin films; zirconia; PVD; CVD; liquid precursor methods
Categories
Ask authors/readers for more resources
This paper reviews different thin-film deposition methods for oxides, especially for stabilized zirconia and compares them with regard to SOFC applications. These methods will be classified into chemical, physical methods and ceramic powder processes. Each method is described with its special technical features and examples of components for fuel cells are given. PVD and CVD methods are specially suited to depositing high-quality films of simple chemical compositions. Liquid droplet methods and ceramic powder processes are more qualified for the deposition of complicated chemical compositions. (C) 2000 Elsevier Science B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available