Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 65, Issue 1-3, Pages 260-263Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-4005(99)00350-0
Keywords
gas sensor; SnO2; In2O3; photoadsorption
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The effects of UV light illumination on the performance of SnO2 and In2O3 semiconductor gas sensors toward CO and NO2 are reported. The sample were prepared with DC sputtering in Ar atmospheres by the Rheotaxial Growth and Thermal Oxidation (RGTO) technique and with reactive magnetron sputtering in Ar and O-2 atmosphere, respectively. Results are quite promising for the development of sensor working at room temperature. (C) 2000 Elsevier Science S.A. All rights reserved.
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