Journal
JOURNAL OF MICROSCOPY-OXFORD
Volume 199, Issue -, Pages 37-44Publisher
BLACKWELL SCIENCE LTD
DOI: 10.1046/j.1365-2818.2000.00705.x
Keywords
EDS; energy dispersive spectrometer; low-beam-energy microanalysis; low-voltage microanalysis; microanalysis; microcalorimeter; microcalorimeter EDS; mu cal EDS
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We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (mu cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy mu cal EDS, designed for operation in the energy range 0.2-2 keV, offers significant advantages for low-beam-energy microanalysis. We present several examples in which the prototype mu cal EDS has been used to solve problems in low-voltage microanalysis, including the analysis of tungsten silicide (WSi2), titanium nitride (TiN) and barium titanate (BaTiO3) and the measurement of chemical shifts in Fe and C compounds.
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