Journal
THIN SOLID FILMS
Volume 370, Issue 1-2, Pages 258-261Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(99)01090-1
Keywords
phase change; crystal structure; Ge2Sb2Te5; GeTe; Rietveld refinements
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Direct X-ray diffraction measurement of the erased state of the Ge-Sb-Te recording layer in a four-layered phase change optical disk, which was produced by an optical disk drive, was performed. It was identified as an fee crystal structure. In order to carry out the detailed crystal structure analysis by the powder X-ray diffraction method with Rietveld refinements, somewhat larger amount of the fee crystal powder was prepared from deposited 10 mu m thick films, It revealed that Ge2Sb2Te5 belongs to the NaCl type structure (Fm (3) over bar m) with the 4a site including 20% vacancies. The conclusion was supported by the results of the density measurements with Grazing Incidence of X-ray Reflectivity. (C) 2000 Elsevier Science S.A. All rights reserved.
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