Journal
APPLIED SURFACE SCIENCE
Volume 162, Issue -, Pages 401-405Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0169-4332(00)00223-3
Keywords
silicon oxide; electron tunneling; dielectric breakdown; atomic force microscopy (AFM)
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We have demonstrated the characterizations the local electrical properties of ultrathin (1-4 nm) SiO2/Si(001) structures using a conducting atomic force microscopy with a nanometer-scale resolution in a vacuum (1 x 10(-5) Pa). The measurement in a vacuum enables to reduce the influence of adsorbed water on quantitative current measurements, while there is a problem at the measurement in air of 60% humidity. Fitting to the Fowler-Nordheim equation is good at thicker SiO2 films more than similar to 3 nm. We have also demonstrated the results of continuous current-voltage measurements during the breakdown process by charge injection through a conducting probe. (C) 2000 Elsevier Science B.V. All rights reserved.
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