Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 33, Issue 16, Pages 1953-1956Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0022-3727/33/16/303
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The contact resistance between a carbon nanotube and metal electrodes decreases by several orders of magnitude and becomes long-term stable when the nanotube contacted by Ti-Au electrodes was annealed by a rapid thermal annealing method at 600-800 degrees C for 30 s. The contact resistances of the annealed samples are in the range 0.5-50 k Omega at room temperature, depending on the electrical properties of the nanotube. The short and relatively low-temperature annealing process enables us to make a surface Ti-nanotube contact suitable for electrical measurements. For the samples with relatively low contact resistances (0.5-5 k Omega) at room temperature, the contact resistance remained constant or decreased slightly as the temperature was lowered. Those with a relatively high contact resistance (5-50 k Omega), on the other hand, showed increasing contact resistance with a lowering of the temperature.
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