Journal
INORGANIC MATERIALS
Volume 36, Issue 9, Pages 884-890Publisher
MAIK NAUKA/INTERPERIODICA
DOI: 10.1007/BF02758698
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The kinetics of heterogeneous decomposition of methylsilane in a pumped hot-wall reactor were studied just below the critical partial pressure for homogeneous decomposition. The activation energies of the process derived from gas-phase conversion measurements and from deposition rates of SiC were found to be equal (about 230 kJ/mol). The nature of the diluent (H-2, He, or Ar) has only a weak effect on the reaction order in methylsilane (m similar or equal to 1), as well as on the composition and structure of amorphous Si0.53C0.47 films.
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