Journal
JOURNAL OF CRYSTAL GROWTH
Volume 218, Issue 2-4, Pages 161-166Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0022-0248(00)00537-6
Keywords
gallium nitride; infrared reflectivity; electronic properties; homoepitaxy; polarity
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We performed an infrared study on the highly n-type and semi-insulating GaN single crystals. We also studied epitaxial layers (homoepitaxy) grown on the (0 0 0 (1) over bar)N and (0 0 0 1)Ga faces of these crystals. For the n-type GaN single crystals, we show that the (0 0 0 (1) over bar)N faces always possess much higher free carrier concentration than the (0 0 0 1)Ga face. Moreover, infrared reflectivity of the layers deposited on both polarity of semi-insulating and highly conducting bulk GaN substrates shows that the incorporation of impurities (most probably oxygen and silicon) is systematically higher in the layers grown on the (0 0 0 (1) over bar)N faces. These results clearly indicate that the growth of epitaxial layers on the bulk GaN substrates should be done on the (0 0 0 1)Ca faces of the GaN crystals. (C) 2000 Elsevier Science B.V. All rights reserved.
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