Preparation, characterisation and applications of thin films for gas sensors prepared by cheap chemical method

The physical properties of pure and doped (Ni, Os, Pd and Pt) SnO2 thin films, prepared by using a chloride-based inorganic sol-gel route, have been reported. These properties were investigated by using differential scanning calorimetry and thermogravimetric (DSC/TG), FTIR, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and atomic force microscopy (AFM) techniques. Microsensors for gas detection were also fabricated and tested in various atmospheres (nitrogen oxide, carbon monoxide, ethanol, methanol and methane). The dopants affected the coating properties depending on the formation of nanoparticles. Furthermore the gas-sensing properties towards reducing and oxidising gases were found to be dependent on the nature of doping element. An array consisting of the manufactured sensors has been arranged and examples of applications for electronic nose are given. (C) 2000 Elsevier Science B.V. All rights reserved.