Journal
IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 12, Issue 11, Pages 1519-1521Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/68.887729
Keywords
MEMS; micromirror; microoptics; self-assembly
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Three-dimensional, electrostatically driven resonant torsion mirror microscanners are constructed by surface tension powered out-of-plane rotation of parts formed in bonded silicon-on-insulator. Simultaneous self-assembly of the fixed electrodes using a below-substrate limiter mechanism allows scanning perpendicular to the assembly axis, and direct drive allows high-Q operation.
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