Journal
BIOCHIP JOURNAL
Volume 4, Issue 3, Pages 179-183Publisher
KOREAN BIOCHIP SOCIETY-KBCS
DOI: 10.1007/s13206-010-4303-9
Keywords
DNA; Dry film resist; PCR-chip; Amplifier; MEMS
Funding
- Ministry of Education, Science Technology (MEST)
- Korea Institute for Advancement of Technology (KIAT)
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The fabrication technique of DFR using micro channels can form hundreds micro thickness channels with only a photo-lithography process without any etching. Also, DFR is confirmed low consumption power because DFR has very lower thermal conductivity (2.33 W/mK) in comparison with silicon (168 W/mK) therefore displays high performance in heating an internal sample. As DFR is hydrophilic, it can bond with glasses without any treatment. Therefore, anodic bonding process using silicon bulk micro-machining or an RIE process used in the PDMS fabrication technique using O-2 plasma is not necessary. According to these advantages, it is expected that production cost can be decreased because fabrication costs of the PCR chamber is decreased. In this paper, a soda-lime glass substrate coated with a DFR of the fluid to cycle through different temperature zones was used to form a micro-channel structure and integrated Pt heater continuous-flow PCR.
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