Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 10, Issue 1, Pages 92-98Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0963-0252/10/1/312
Keywords
-
Categories
Ask authors/readers for more resources
This research concerns the development of a SF6 RF discharge at low pressure in a small reactor for industrial applications. The plasma is produced in the pressure range 0.05-1 mbar by a RF supply. The pumping system sustains a flowrate of about 50 cm s(-1), with residence time in the discharge of about 0.2 s at a pressure of 0.1 mbar. The discharge parameters were measured at a low operation power. Measurements were performed by means of movable electrostatic probes and a photodiode. Particular care in the analysis of the data proved to be necessary due to the presence of a substantial amount of negative ions. The reactor has been employed for textile treatment in order to modify the surface properties of the fibres. Favourable operating conditions leading to an improved hydrophobicity of the textiles were achieved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available