Absolute cross sections for dissociative electron attachment to NF3

Absolute dissociative electron attachment cross sections for the formation of F-, F-2(-), and NF2- from NF3 have been measured in a crossed beams geometry by using the relative flow technique. Discrimination against ions with high kinetic energy are eliminated by employing a pulsed electron beam, pulsed ion extraction and a segmented time of flight mass spectrometer. The cross sections for the F- formation, which is the dominant channel, is found to be almost a factor of 2 larger than what is reported earlier. This descrepancy is explained in terms of the discrimination against ions of appreciable kinetic energy in earlier measurements. (C) 2001 Elsevier Science B.V.