Journal
SURFACE AND INTERFACE ANALYSIS
Volume 31, Issue 3, Pages 200-205Publisher
JOHN WILEY & SONS LTD
DOI: 10.1002/sia.972
Keywords
low-energy ion scattering; quantitative surface analysis; characteristic velocity method; resonant neutralization
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Quantification of the surface composition of low-work function systems using low-energy noble gas ion scattering is strongly influenced by resonant neutralization. Below a certain threshold in the work function, resonant neutralization to the first excited level of the ion is possible and the neutralization probability of the ions increases exponentially with decreasing work function. We show how to correct for the influence of the work function and perform the quantification using the characteristic velocity method. The discussion and conclusions here are relevant for all ion scattering studies using low-energy noble gas ions on surfaces with a work function below similar to4 eV. Copyright (C) 2001 John Wiley & Sons, Ltd.
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