Sidewall passivation of GaAs in BCl3-containing atmospheres

The sidewall passivation of GaAs in atmospheres containing the chain-building molecule BCl3 has been investigated employing Auger electron spectroscopy and time-of-flight secondary ion mass spectrometry. It could be proven that the film that protects the sidewalls from further chemical attack is composed mainly of (B2Cl4)(proportional to) rather than polymers of B2O3. (C) 2001 American Vacuum Society.