Journal
OPTICS LETTERS
Volume 26, Issue 5, Pages 277-279Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.26.000277
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We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps: (i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10 mum in diameter inside the volume with any angle of interconnection and a high aspect ratio (10-mum-diameter channels in a 100-mum-thick silica slab). (C) 2001 Optical Society of America.
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