Journal
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume 114, Issue -, Pages 975-987Publisher
ELSEVIER
DOI: 10.1016/S0368-2048(00)00261-9
Keywords
microscopy; spectroscopy; diffraction; cathode lens; energy filter; aberration correction
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The fundamentals, the present state and the future prospects of photoelectron spectromicroscopy, microspectroscopy and microdiffraction in parallel imaging immersion lens/cathode lens electron microscopes are reviewed. The emphasis is on the instrumental aspects and on the experimental possibilities and limitations that are illustrated by some application examples. Special attention is given to the combination with nonspectroscopic imaging methods such as low energy electron microscopy and mirror microscopy that are possible with appropriately configured systems. Such multi-method instruments are expected to play a major role in the future. (C) 2001 Elsevier Science B.V. All rights reserved.
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