Emission uniformity enhancement between microfabricated tips in cold cathode arrays

The current-voltage characteristics can vary significantly between individual microfabricated tips in as-fabricated arrays of cold cathodes. Such emission nonuniformity is undesirable in device applications. We have shown that in situ tip self-heating by the emitted electron current can be used to make the current-voltage characteristics of microfabricated field emitter tips nearly identical to one another. The improved emission uniformity will allow for more reliable array operation at increased electron emission current densities. (C) 2001 American Vacuum Society.