Bond modification of BCN films on Ni substrate

We show that the composition for boron-carbon-nitrogen (BCN) ternary films can be tailored by controlling the quantities of the carbon and BN plumes together with the use of in situ nitrogen ion bombardment. At 800 degreesC, BCN films with composition of BC2N are obtained on Si (100) substrates. However, Fourier transformed infrared (FTIR) and X-ray photoelectron spectroscopy (XPS) measurements indicate that these films are carbon doped BN compounds (BN:C), in which, phase separation of the carbon and BN phases occurred. On the other hand, hybridized BCN films can be deposited on Ni substrates under similar synthesis conditions. In such a case, the carbon and BN phases are hybridized through the carbon nitride and boron carbide bonds. These films appeared in fibrous nanostructures as observed by field emission scanning electron microscopy (FESEM). Evidence indicates that the Ni substrate acts as a sink for the carbon and forces the carbon composites to grow on top of the B and N atoms. By this means, bond hybridization between the carbon and BN phases occurred. (C) 2001 Elsevier Science B.V. All rights reserved.