Journal
APPLIED PHYSICS LETTERS
Volume 78, Issue 12, Pages 1787-1789Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1352697
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We have developed an atomic force microscope that uses interferometry for parallel readout of a cantilever array. Each cantilever contains a phase sensitive diffraction grating consisting of a reference and movable set of interdigitated fingers. As a force is applied to the tip, the movable set is displaced and the intensity of the diffracted orders is altered. The order intensity from each cantilever is measured with a custom array of silicon photodiodes with integrated complementary metal-oxide-semiconductor amplifiers. We present images from five cantilevers acquired in the constant height mode that reveal surface features 2 nm in height. The interdigital method for cantilever array readout is scalable, provides angstrom resolution, and is potentially simpler to implement than other methods. (C) 2001 American Institute of Physics.
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