Journal
THIN SOLID FILMS
Volume 388, Issue 1-2, Pages 1-4Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(01)00827-6
Keywords
porous silica; xerogels; elastic properties; dielectric properties; surface acoustic waves
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Density/porosity is the most important parameter determining properties of porous films; however, it is difficult to measure. This letter reports characterization of density/porosity and Young's modulus values of a range of nanoporous silica aerogel films via dispersion of laser-generated, wideband, surface acoustic waves. The technique shows a clear relationship between dielectric constant, porosity and Young's modulus. Low Young's modulus values show that film stiffness is drastically reduced with increasing porosity. The technique is rapid, non-destructive and relatively inexpensive, and yields absolute values of aerogel elastic properties, which are useful for process control; such properties are difficult to access using other techniques. (C) 2001 Elsevier Science B.V. All rights reserved.
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