Journal
NANOTECHNOLOGY
Volume 12, Issue 2, Pages 91-95Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/12/2/303
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We review the salient aspects of nanoimprint lithography and consider the challenges it faces in becoming a standard fabrication technique, such as costs and throughput. We discuss material issues such as visco-elasticity and functionality of the printed material. By way of an illustration, we present printing results of 50 nm features over a 2 x 2 cm(2) area which are reproducible with high fidelity. Data of printing 15 nm features in PMMA using a Cr stamp was obtained.
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