Ultra-thin bi-axially textured IBAD MgO template layers resolved by grazing incidence X-ray diffraction

We describe a method using grazing incidence diffractometry (GID) with a rotating anode X-ray source to measure the in-plane alignment of similar to 10-nm thick MgO films deposited by ion beam assisted deposition (IBAD). In conjunction with these measurements, we have calibrated the IBAD film growth process by monitoring the film in situ with reflected high-energy electron diffraction and comparing the intensity versus time curve with results obtained from the ex situ GID measurements. GID has also been used to identify differences in the observed in-plane texture for samples with and without the addition of a homoepitaxial layer. Improvements in texture after the addition of the homoepitaxial layer are attributed to the healing of ion induced damage during growth of the IBAD layer. Further analysis has revealed that standard X-ray diffraction measurements of these overcoated films do not sufficiently quantify the in-plane alignment of the initial IBAD layers, (C) 2001 Elsevier Science B.V. All rights reserved.