Journal
THIN SOLID FILMS
Volume 391, Issue 2, Pages 275-281Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(01)00995-6
Keywords
copper sulfide; gas sensors; thin films; surface properties
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Surface and electrical properties of thin CuxS films grown on different substrates (polyethylene and micro-porous-Si layer) sensitive to ammonia at room temperature are investigated. The resistance response to ammonia is measured in the CuxS in air with relative humidity from 15 to 100% at temperatures from 290 to 350 K. The surface chemical composition and the morphology are analysed. A honeycombed construction of the CuxS films deposited on a micro-porous Si-layer and proportions between components in the chemical composition are found to correlate with the higher sensitivity to ammonia in air at room temperature. (C) 2001 Elsevier Science B.V. All rights reserved.
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