4.6 Article

Pi-gate SOI MOSFET

Journal

IEEE ELECTRON DEVICE LETTERS
Volume 22, Issue 8, Pages 405-406

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/55.936358

Keywords

insulated gate FETs; MOS devices; semiconductor device modeling; silicon on insulator technology

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This paper describes computer simulations of various SOI MOSFETs with double and triple gate structures, as well as gate-all-around devices. The concept of a triple-gate device with sidewalls extending into the buried oxide thereby called a II-gate or Pi-gate MOSFET) is introduced. The proposed device is simple to manufacture and offers electrical characteristics similar to the much harder to fabricate gate-all-around MOSFET.

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