Recent progress of nanotechnologies of thin films for industrial applications

Attempt has been made to clarify the relationship between fine structures of thin films and the interface specially prepared by nanotechnologies of vacuum deposition and their optical, electrical and mechanical properties. This review paper first describes the state-of-the-art of thin film technologies to control the nanostructure inside the films and then present the several examples. These include: (1) optical properties of obliquely deposited thin films with anisotropic nanostructure, and (2) the effect of electronic structures of Alq(3)/electron injection layer/Al interfaces in organic light-emitting diodes on the device performance. Finally, future challenges for wide applications of thin films in the genre of various industries will be discussed. (C) 2001 Elsevier Science B.V. All rights reserved.